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High resolution X-ray microscopy as a core facility for correlative imaging

W. Harris, L. Lavery, A. Merckle and P. Lander

ZEISS XRM Group

Email: pete.lander@zeiss.com

BY MSSA TECH FORUM

X-ray microscopy (XRM) provides non-destructive 3D imaging capabilities on specimens across a range of length scales, observing features with sizes spanning from nanometers to millimeters. Recent developments, inspired by results from dedicated synchrotron sources, have incorporated a number of X-ray optical elements that have driven resolution and contrast to levels previously unachievable by conventional X-ray computed tomography (CT) instrumentation. Now coupling these elements with high-energy polychromatic laboratory X-ray sources, ZEISS Xradia 810 Ultra, for example, can achieve 50 nm spatial resolution with the convenience of everyday laboratory access. This presentation will cover the unique X-ray detectors used in ZEISS XRM and the advantages of system architecture for enhanced-phase contrast, collection of interior tomography, dual energy, and in situ studies. Furthermore, the non-destructive imaging capability of high-resolution XRM provides unique opportunities to study samples in their native environments (in situ) and to quantify how their microstructures evolve over time. This is beneficial for increased accuracy when coupling XRM datasets to computational models or simulation. These combined characteristics have motivated increased correlative characterization alongside conventional central microscopy laboratory resources, including scanning electron microscopy (SEM), focused ion beam SEM (FIB/SEM), transmission electron microscopy (TEM), and light microscopy in a broad range of applications from geosciences, life sciences and materials science.

 November 06, 2015
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